書誌事項
- 公開日
- 1998-06-08
- DOI
-
- 10.31438/trf.hh1998.33
- 公開者
- Transducer Research Foundation, Inc.
収録刊行物
-
- 1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest
-
1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest 150-155, 1998-06-08
Transducer Research Foundation, Inc.