Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

DOI Web Site Web Site 13 Citations

Journal

Diamond and Related Materials

Diamond and Related Materials 10 (11), 1952-1961, 2001-11

Elsevier BV

Citations (13)*help

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Details 詳細情報について

CRID

1360011146028197504
DOI

10.1016/s0925-9635(01)00385-5
ISSN

09259635
Web Site

https://api.elsevier.com/content/article/PII:S0925963501003855?httpAccept=text/xml

https://api.elsevier.com/content/article/PII:S0925963501003855?httpAccept=text/plain
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