Elastic modulus and coefficient of thermal expansion of piezoelectric Al<sub>1−x</sub>Sc<sub>x</sub>N (up to x = 0.41) thin films

DOI Web Site 2 Citations
  • Yuan Lu
    Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
  • Markus Reusch
    Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
  • Nicolas Kurz
    Laboratory for Compound Semiconductor Microsystems, IMTEK—Department of Microsystems Engineering, University of Freiburg, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
  • Anli Ding
    Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
  • Tim Christoph
    Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
  • Mario Prescher
    Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
  • Lutz Kirste
    Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
  • Oliver Ambacher
    Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
  • Agnė Žukauskaitė
    Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany

Journal

  • APL Materials

    APL Materials 6 (7), 076105-, 2018-07

    AIP Publishing

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