(hfac)Cu(I)(MP) (hfac=hexafluoroacetylacetonate, MP=4-methyl-1-pentene) and (hfac)Cu(I)(DMB) (DMB=3,3-dimethyl-1-butene) for the chemical vapor deposition of copper film

詳細情報 詳細情報について

• CRID

  1360292620133460608

• NII論文ID

  30006178206

• DOI

  10.1016/s0040-6090(99)00346-6

• ISSN

  00406090

• Web Site

  https://api.elsevier.com/content/article/PII:S0040609099003466?httpAccept=text/xml

  https://api.elsevier.com/content/article/PII:S0040609099003466?httpAccept=text/plain

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