Fast modeling of the low-pressure capacitively coupled radio-frequency discharge based on the nonlocal approach

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  • S. V. Berezhnoi
    Physical Technical Department, St. Petersburg State Technical University, 195251 Russia, CIS
  • I. D. Kaganovich
    Physical Technical Department, St. Petersburg State Technical University, 195251 Russia, CIS
  • L. D. Tsendin
    Physical Technical Department, St. Petersburg State Technical University, 195251 Russia, CIS
  • V. A. Schweigert
    Institute of Theoretical and Applied Mechanics, 630090 Novosibirsk, Russia, CIS

Abstract

<jats:p>The results of modeling a low-pressure capacitively coupled radio-frequency (rf) discharge based on the nonlocal approach are reported. The approximation employed enables fast modeling (FM) of the electron distribution function. The solution of the full problem, which consists of calculation of the electron distribution, rf, and stationary electric fields, and of the plasma density profile, for simple atomic gas takes ∼10 min on the IBM PC 486DX2/66. To check the validity of the FM the full scale Monte Carlo modeling was performed. The results of the fast and the full scale modeling are in agreement.</jats:p>

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