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Pickup lens inspection on the 5th order aberration using shearing interference by grating with curve fitting algorithm

DOI PDF Web Site Web Site 2 Citations

Journal

Optical Review

Optical Review 8 (6), 463-, 2001-11

Springer Science and Business Media LLC

Citations (2)*help

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Keywords

Atomic and Molecular Physics, and Optics

Details 詳細情報について

CRID

1360298341225767552
NII Article ID

30039139275
DOI

10.1007/bf02931736
ISSN

13499432

13406000
Web Site

https://link.springer.com/content/pdf/10.1007/BF02931736.pdf

https://link.springer.com/article/10.1007/BF02931736/fulltext.html

http://link.springer.com/content/pdf/10.1007/BF02931736
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