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Actinic Mask Blank Inspection and Signal Analysis for Detecting Phase Defects Down to 1.5 nm in Height
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Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 48 (6S), 06FA04-, 2009-06-01
IOP Publishing
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Details 詳細情報について
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- CRID
- 1360566396808200192
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- NII Article ID
- 210000066891
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- ISSN
- 13474065
- 00214922
- http://id.crossref.org/issn/13474065
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- Data Source
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- Crossref
- CiNii Articles
