Actinic Mask Blank Inspection and Signal Analysis for Detecting Phase Defects Down to 1.5 nm in Height

詳細情報 詳細情報について

• CRID

  1360566396808200192

• NII論文ID

  210000066891

• DOI

  10.1143/jjap.48.06fa04

• ISSN

  13474065

  00214922

  http://id.crossref.org/issn/13474065

• Web Site

  https://iopscience.iop.org/article/10.1143/JJAP.48.06FA04

  https://iopscience.iop.org/article/10.1143/JJAP.48.06FA04/pdf

• データソース種別

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  • CiNii Articles