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Simulation of secondary electron emission from a stepped surface in scanning ion microscopes

DOI Web Site Web Site 2 Citations 28 References

Kaoru Ohya

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Journal

Japanese Journal of Applied Physics

Japanese Journal of Applied Physics 53 (6S), 06JB01-, 2014-05-08

IOP Publishing

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Keywords

Details 詳細情報について

CRID

1360566399842891776
NII Article ID

210000144068
DOI

10.7567/jjap.53.06jb01
ISSN

13474065

00214922

http://id.crossref.org/issn/13474065
Web Site

http://stacks.iop.org/1347-4065/53/i=6S/a=06JB01/pdf

http://stacks.iop.org/1347-4065/53/i=6S/a=06JB01?key=crossref.859f6fdfa1b3a6be0ca564f290d638e9
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