【Updated on Oct. 28, 2024】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
Impact of the Release of the New "NDL Search" on CiNii Services
Trial version of CiNii Research Automatic Translation feature is available on CiNii Labs

Plasma–surface interactions for advanced plasma etching processes in nanoscale ULSI device fabrication: A numerical and experimental study

DOI Web Site Web Site 22 Citations 30 References

Journal

Thin Solid Films

Thin Solid Films 518 (13), 3461-3468, 2010-04

Elsevier BV

Citations (22)*help

See more

References(30)*help

See more

Related Projects

See more

Details 詳細情報について

CRID

1360567182493857792
DOI

10.1016/j.tsf.2009.11.030
ISSN

00406090
Web Site

https://api.elsevier.com/content/article/PII:S0040609009019245?httpAccept=text/xml

https://api.elsevier.com/content/article/PII:S0040609009019245?httpAccept=text/plain
Data Source
- Crossref
- KAKEN

Export

Report a problem

Back to top