Surface morphology evolution during plasma etching of silicon: roughening, smoothing and ripple formation
Journal
-
- Journal of Physics D: Applied Physics
-
Journal of Physics D: Applied Physics 50 (41), 414001-, 2017-09-15
IOP Publishing
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1360567184378188672
-
- ISSN
- 13616463
- 00223727
-
- Data Source
-
- Crossref
- KAKEN