Micromechanical "hollow-disk" ring resonators

DOI PDF 2 Citations

Journal

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest 821-824,

IEEE

Citations (2)*help

See more

Details 詳細情報について

CRID

1360574094730350848
DOI

10.1109/mems.2004.1290711
Web Site

http://xplorestaging.ieee.org/ielx5/9060/28749/01290711.pdf?arnumber=1290711
Data Source
- Crossref

Export

Report a problem

Back to top