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Microwave plasma in hydrocarbon liquids
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- Shinfuku Nomura
- Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
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- Hiromichi Toyota
- Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
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- Shinobu Mukasa
- Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
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- Hiroshi Yamashita
- Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
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- Tsunehiro Maehara
- Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
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- Makoto Kuramoto
- Ehime University Integrated Center for Sciences, , 2-5 Bunkyo-cho, Matsuyama 790-8577, Japan
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Description
<jats:p>The generation of microwave plasma in liquid with vapor bubbles has been achieved and will soon be applied to high-speed chemical vapor deposition. Vapor bubbles are induced from an electrode by heating. The deposition rate of diamondlike carbon films depends on the pressure and the power of the microwave supply. Polycrystalline silicon carbide is synthesized on a silicon substrate in a mixture of n-dodecane and silicone oil. The dispersion of water droplets in liquid creates many pores on the silicon carbide films. The synthesis of carbon nanotubes can be achieved in liquid benzene.</jats:p>
Journal
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- Applied Physics Letters
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Applied Physics Letters 88 (21), 211503-, 2006-05-22
AIP Publishing
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Details 詳細情報について
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- CRID
- 1360574095725803648
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- ISSN
- 10773118
- 00036951
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- Data Source
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- Crossref