Microwave plasma in hydrocarbon liquids

DOI PDF 15 Citations
  • Shinfuku Nomura
    Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
  • Hiromichi Toyota
    Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
  • Shinobu Mukasa
    Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
  • Hiroshi Yamashita
    Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
  • Tsunehiro Maehara
    Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
  • Makoto Kuramoto
    Ehime University Integrated Center for Sciences, , 2-5 Bunkyo-cho, Matsuyama 790-8577, Japan

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<jats:p>The generation of microwave plasma in liquid with vapor bubbles has been achieved and will soon be applied to high-speed chemical vapor deposition. Vapor bubbles are induced from an electrode by heating. The deposition rate of diamondlike carbon films depends on the pressure and the power of the microwave supply. Polycrystalline silicon carbide is synthesized on a silicon substrate in a mixture of n-dodecane and silicone oil. The dispersion of water droplets in liquid creates many pores on the silicon carbide films. The synthesis of carbon nanotubes can be achieved in liquid benzene.</jats:p>

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