Microwave plasma in hydrocarbon liquids

Shinfuku Nomura, Hiromichi Toyota, Shinobu Mukasa, Hiroshi Yamashita, Tsunehiro Maehara, Makoto Kuramoto

doi:10.1063/1.2208167

Microwave plasma in hydrocarbon liquids

Shinfuku Nomura

Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
Hiromichi Toyota

Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
Shinobu Mukasa

Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
Hiroshi Yamashita

Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
Tsunehiro Maehara

Ehime University Graduate School of Science and Engineering, , 3 Bunkyo-cho, Matsuyama 790-8577, Japan
Makoto Kuramoto

Ehime University Integrated Center for Sciences, , 2-5 Bunkyo-cho, Matsuyama 790-8577, Japan

説明

<jats:p>The generation of microwave plasma in liquid with vapor bubbles has been achieved and will soon be applied to high-speed chemical vapor deposition. Vapor bubbles are induced from an electrode by heating. The deposition rate of diamondlike carbon films depends on the pressure and the power of the microwave supply. Polycrystalline silicon carbide is synthesized on a silicon substrate in a mixture of n-dodecane and silicone oil. The dispersion of water droplets in liquid creates many pores on the silicon carbide films. The synthesis of carbon nanotubes can be achieved in liquid benzene.</jats:p>