Potential of micrometer-sized graphite as a catalyst for chemical etching of silicon

DOI Web Site Web Site 4 Citations

Journal

Materials Science in Semiconductor Processing

Materials Science in Semiconductor Processing 121 105327-, 2021-01

Elsevier BV

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Details 詳細情報について

CRID

1360576121820389504
DOI

10.1016/j.mssp.2020.105327
ISSN

13698001
Web Site

https://api.elsevier.com/content/article/PII:S1369800120312622?httpAccept=text/xml

https://api.elsevier.com/content/article/PII:S1369800120312622?httpAccept=text/plain
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