Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques

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Journal

Microelectronic Engineering

Microelectronic Engineering 257 111753-, 2022-03

Elsevier BV

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CRID

1360580933353641216
DOI

10.1016/j.mee.2022.111753
ISSN

01679317
Web Site

https://api.elsevier.com/content/article/PII:S0167931722000478?httpAccept=text/xml

https://api.elsevier.com/content/article/PII:S0167931722000478?httpAccept=text/plain
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