Numerical Simulations to Study Growth of Single-Crystal Diamond by Using Microwave Plasma Chemical Vapor Deposition with Reactive (H, C, N) Species

詳細情報 詳細情報について

• CRID

  1360847874816016384

• NII論文ID

  210000141149

• DOI

  10.7567/jjap.51.090105

• ISSN

  13474065

  00214922

• データソース種別

  • Crossref
  • CiNii Articles