Dependence of absolute photon flux on infrared absorbance alteration and surface roughness on photoresist polymers irradiated with vacuum ultraviolet photons emitted from HBr plasma

Details 詳細情報について

• CRID

  1360847874821505920

• NII Article ID

  210000148466

• DOI

  10.7567/jjap.56.126503

• ISSN

  13474065

  00214922

• Web Site

  http://stacks.iop.org/1347-4065/56/i=12/a=126503/pdf

  http://stacks.iop.org/1347-4065/56/i=12/a=126503?key=crossref.2293977a689f9f5c861b6e80bee0b4c7

• Data Source

  • Crossref
  • CiNii Articles