Atomic Layer Epitaxy Growth of TiN Thin Films

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  • Mikko Ritala
    Department of Chemistry, University of Helsinki, FIN‐00014 Helsinki, Finland
  • Markku Leskelä
    Department of Chemistry, University of Helsinki, FIN‐00014 Helsinki, Finland
  • Eero Rauhala
    Accelerator Laboratory, University of Helsinki, FIN‐00014 Helsinki, Finland
  • Pekka Haussalo
    Accelerator Laboratory, University of Helsinki, FIN‐00014 Helsinki, Finland

Bibliographic Information

Published
1995-08-01
Rights Information
  • https://iopscience.iop.org/page/copyright
  • https://iopscience.iop.org/info/page/text-and-data-mining
DOI
  • 10.1149/1.2050083
Publisher
The Electrochemical Society

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