Atomic Layer Deposition of Lithium Phosphorus Oxynitride

DOI Web Site 3 Citations
  • Mikko Nisula
    Department of Chemistry, Aalto University, FI-00076 Aalto, Finland
  • Yohei Shindo
    Higashifuji Technical Center, Toyota Motor Co., 1200 Mishuku, Susono, Japan
  • Hideyuki Koga
    Higashifuji Technical Center, Toyota Motor Co., 1200 Mishuku, Susono, Japan
  • Maarit Karppinen
    Department of Chemistry, Aalto University, FI-00076 Aalto, Finland

Journal

  • Chemistry of Materials

    Chemistry of Materials 27 (20), 6987-6993, 2015-10-07

    American Chemical Society (ACS)

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