Global model and diagnostic of a low-pressure SF<sub>6</sub>/Ar inductively coupled plasma

DOI 1 Citations

Journal

Plasma Sources Science and Technology

Plasma Sources Science and Technology 18 (2), 025001-, 2009-02-23

IOP Publishing

Citations (1)*help

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Details 詳細情報について

CRID

1360857597255336704
DOI

10.1088/0963-0252/18/2/025001
ISSN

13616595

09630252
Data Source
- Crossref

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