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MEMS-Based AlScN Resonating Energy Harvester With Solidified Powder Magnet
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- Erdem Yarar
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Simon Fichtner
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Patrick Hayes
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Andre Piorra
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Tim Reimer
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Thomas Lisec
- Fraunhofer Institute for Silicon Technology, Itzehoe, Germany
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- Peter Frank
- Sandvik Coromant GmbH, Schmalkalden, Germany
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- Bernhard Wagner
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Fabian Lofink
- Fraunhofer Institute for Silicon Technology, Itzehoe, Germany
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- Dirk Meyners
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Eckhard Quandt
- Faculty of Engineering, Kiel University, Kiel, Germany
Search this article
Journal
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- Journal of Microelectromechanical Systems
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Journal of Microelectromechanical Systems 28 (6), 1019-1031, 2019-12
Institute of Electrical and Electronics Engineers (IEEE)
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Details 詳細情報について
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- CRID
- 1360857674613533184
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- ISSN
- 19410158
- 10577157
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- Data Source
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- Crossref
