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- Erdem Yarar
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Simon Fichtner
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Patrick Hayes
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Andre Piorra
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Tim Reimer
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Thomas Lisec
- Fraunhofer Institute for Silicon Technology, Itzehoe, Germany
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- Peter Frank
- Sandvik Coromant GmbH, Schmalkalden, Germany
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- Bernhard Wagner
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Fabian Lofink
- Fraunhofer Institute for Silicon Technology, Itzehoe, Germany
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- Dirk Meyners
- Faculty of Engineering, Kiel University, Kiel, Germany
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- Eckhard Quandt
- Faculty of Engineering, Kiel University, Kiel, Germany
この論文をさがす
収録刊行物
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- Journal of Microelectromechanical Systems
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Journal of Microelectromechanical Systems 28 (6), 1019-1031, 2019-12
Institute of Electrical and Electronics Engineers (IEEE)
