Laser chemical etching of vias in GaAs

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Journal

IEEE Electron Device Letters

IEEE Electron Device Letters 4 (2), 39-41, 1983-02

Institute of Electrical and Electronics Engineers (IEEE)

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CRID

1360861290710379008
DOI

10.1109/edl.1983.25639
ISSN

07413106
Web Site

http://xplorestaging.ieee.org/ielx5/55/31886/01483383.pdf?arnumber=1483383
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