Dry-Etching Processes for High-Aspect-Ratio Features with Sub-10 nm Resolution High-χ Block Copolymers

DOI Web Site 1 Citations
  • Gwenaelle Pound-Lana
    Univ. Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, 38000 Grenoble, France
  • Philippe Bézard
    Univ. Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, 38000 Grenoble, France
  • Camille Petit-Etienne
    Univ. Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, 38000 Grenoble, France
  • Sébastien Cavalaglio
    Univ. Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, 38000 Grenoble, France
  • Gilles Cunge
    Univ. Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, 38000 Grenoble, France
  • Benjamin Cabannes-Boué
    Univ. Bordeaux, CNRS, Bordeaux INP, LCPO, UMR 5629, F-33600 Pessac, France
  • Guillaume Fleury
    Univ. Bordeaux, CNRS, Bordeaux INP, LCPO, UMR 5629, F-33600 Pessac, France
  • Xavier Chevalier
    ARKEMA FRANCE, GRL, Route Nationale 117, BP34, 64170 Lacq, France
  • Marc Zelsmann
    Univ. Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, 38000 Grenoble, France

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