An industrial and applied review of new MEMS devices features

DOI Web Site Web Site 5 Citations

Masako Tanaka

Journal

Microelectronic Engineering

Microelectronic Engineering 84 (5-8), 1341-1344, 2007-05

Elsevier BV

Citations (5)*help

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Details 詳細情報について

CRID

1361137044294987136
DOI

10.1016/j.mee.2007.01.232
ISSN

01679317
Web Site

https://api.elsevier.com/content/article/PII:S0167931707001633?httpAccept=text/xml

https://api.elsevier.com/content/article/PII:S0167931707001633?httpAccept=text/plain
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