Silicon nanomembrane phototransistor flipped with multifunctional sensors toward smart digital dust

  • Gongjin Li
    Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
  • Zhe Ma
    Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China.
  • Chunyu You
    Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
  • Gaoshan Huang
    Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
  • Enming Song
    Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
  • Ruobing Pan
    Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
  • Hong Zhu
    Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
  • Jiaqi Xin
    Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
  • Borui Xu
    Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
  • Taeyoon Lee
    Department of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, South Korea.
  • Zhenghua An
    Department of Physics, Fudan University, Shanghai 200433, P. R. China.
  • Zengfeng Di
    Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China.
  • Yongfeng Mei
    Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.

Description

<jats:p>Flexible phototransistors are integrated with stimuli-responsive materials for multimodal sensing via CMOS-compatible strategy.</jats:p>

Journal

  • Science Advances

    Science Advances 6 (18), 2020-05

    American Association for the Advancement of Science (AAAS)

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