A high-intensity scanning ion probe with submicrometer spot size

DOI PDF 被引用文献20件
  • R. L. Seliger
    Hughes Research Laboratories, Malibu, California 90265
  • J. W. Ward
    Hughes Research Laboratories, Malibu, California 90265
  • V. Wang
    Hughes Research Laboratories, Malibu, California 90265
  • R. L. Kubena
    Hughes Research Laboratories, Malibu, California 90265

書誌事項

公開日
1979-03-01
DOI
  • 10.1063/1.90786
公開者
AIP Publishing

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説明

<jats:p>A liquid-metal gallium-ion source was imaged by unity-magnification single-gap accelerating lens with a postlens deflector to form a focused scanning probe. We report the dependence of the probe diameter and probe current on the lens acceptance half-angle. The results range between probe diameters of 1000 and 5000 Å at currents of 0.12–3.0 nA for half-angles of 1.2–6 mrad. The current density and brightness at the target for the 1000-Å-diam 57-kV probe were 1.5 A/cm2 and 3.3×106 A/cm2 sr, respectively. Astigmatic probes were also produced with dimensions smaller than 1000 Å.</jats:p>

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