Amorphous Si — the role of MeV implantation in elucidating defect and thermodynamic properties
収録刊行物
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- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 55 (1-4), 533-543, 1991-04
Elsevier BV