-
- Pierre Thibault
- Paul Scherrer Institut, 5232 Villigen PSI, Switzerland.
-
- Martin Dierolf
- Paul Scherrer Institut, 5232 Villigen PSI, Switzerland.
-
- Andreas Menzel
- Paul Scherrer Institut, 5232 Villigen PSI, Switzerland.
-
- Oliver Bunk
- Paul Scherrer Institut, 5232 Villigen PSI, Switzerland.
-
- Christian David
- Paul Scherrer Institut, 5232 Villigen PSI, Switzerland.
-
- Franz Pfeiffer
- Paul Scherrer Institut, 5232 Villigen PSI, Switzerland.
書誌事項
- 公開日
- 2008-07-18
- DOI
-
- 10.1126/science.1158573
- 公開者
- American Association for the Advancement of Science (AAAS)
この論文をさがす
説明
<jats:p>Coherent diffractive imaging (CDI) and scanning transmission x-ray microscopy (STXM) are two popular microscopy techniques that have evolved quite independently. CDI promises to reach resolutions below 10 nanometers, but the reconstruction procedures put stringent requirements on data quality and sample preparation. In contrast, STXM features straightforward data analysis, but its resolution is limited by the spot size on the specimen. We demonstrate a ptychographic imaging method that bridges the gap between CDI and STXM by measuring complete diffraction patterns at each point of a STXM scan. The high penetration power of x-rays in combination with the high spatial resolution will allow investigation of a wide range of complex mesoscopic life and material science specimens, such as embedded semiconductor devices or cellular networks.</jats:p>
収録刊行物
-
- Science
-
Science 321 (5887), 379-382, 2008-07-18
American Association for the Advancement of Science (AAAS)
