Simulation of critical IC fabrication processes using advanced physical and numerical methods
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- W. Jungling
- Institut für Allegemeine und Elektronik, Abteilung für Physikalische Elektronik, Wein, Austria
書誌事項
- 公開日
- 1985-02
- 権利情報
-
- https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html
- https://doi.org/10.15223/policy-029
- https://doi.org/10.15223/policy-037
- DOI
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- 10.1109/t-ed.1985.21925
- 公開者
- Institute of Electrical and Electronics Engineers (IEEE)
この論文をさがす
収録刊行物
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- IEEE Transactions on Electron Devices
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IEEE Transactions on Electron Devices 32 (2), 156-167, 1985-02
Institute of Electrical and Electronics Engineers (IEEE)
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詳細情報 詳細情報について
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- CRID
- 1361981470988676352
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- ISSN
- 15579646
- 00189383
- http://id.crossref.org/issn/00189383
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- データソース種別
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- Crossref
