Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology
収録刊行物
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- IEEE Transactions on Systems, Man, and Cybernetics: Systems
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IEEE Transactions on Systems, Man, and Cybernetics: Systems 46 (10), 1456-1467, 2016-10
Institute of Electrical and Electronics Engineers (IEEE)
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詳細情報 詳細情報について
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- CRID
- 1362262944693492736
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- ISSN
- 21682232
- 21682216
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- データソース種別
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- Crossref
