Effects of substrate temperature on electrical and structural properties of copper thin films

DOI Web Site Web Site 1 Citations

Journal

Microelectronics Journal

Microelectronics Journal 37 (9), 930-937, 2006-09

Elsevier BV

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Details 詳細情報について

CRID

1362544418710953472
DOI

10.1016/j.mejo.2006.01.011
ISSN

18792391
Web Site

https://api.elsevier.com/content/article/PII:S0026269206000231?httpAccept=text/xml

https://api.elsevier.com/content/article/PII:S0026269206000231?httpAccept=text/plain
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