Calibration of step heights and roughness measurements with atomic force microscopes

DOI Web Site Web Site 2 Citations

Journal

Precision Engineering

Precision Engineering 27 (1), 91-98, 2003-01

Elsevier BV

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Details 詳細情報について

CRID

1362825893813922304
DOI

10.1016/s0141-6359(02)00184-8
ISSN

01416359
Web Site

https://api.elsevier.com/content/article/PII:S0141635902001848?httpAccept=text/xml

https://api.elsevier.com/content/article/PII:S0141635902001848?httpAccept=text/plain
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