Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors
-
- A. Biswas
- Bhabha Atomic Research Centre 1 Atomic & Molecular Physics Division, , Mumbai 400 085, India
-
- R. Sampathkumar
- Bhabha Atomic Research Centre 1 Atomic & Molecular Physics Division, , Mumbai 400 085, India
-
- Ajaya Kumar
- Bhabha Atomic Research Centre 1 Atomic & Molecular Physics Division, , Mumbai 400 085, India
-
- D. Bhattacharyya
- Bhabha Atomic Research Centre 1 Atomic & Molecular Physics Division, , Mumbai 400 085, India
-
- N. K. Sahoo
- Bhabha Atomic Research Centre 1 Atomic & Molecular Physics Division, , Mumbai 400 085, India
-
- K. D. Lagoo
- Bhabha Atomic Research Centre 2 Division of Remote Handling & Robotics, , Mumbai 400 085, India
-
- R. D. Veerapur
- Bhabha Atomic Research Centre 2 Division of Remote Handling & Robotics, , Mumbai 400 085, India
-
- M. Padmanabhan
- Bhabha Atomic Research Centre 2 Division of Remote Handling & Robotics, , Mumbai 400 085, India
-
- R. K. Puri
- Bhabha Atomic Research Centre 2 Division of Remote Handling & Robotics, , Mumbai 400 085, India
-
- Debarati Bhattacharya
- Bhabha Atomic Research Centre 3 Solid State Physics Division, , Mumbai 400 085, India
-
- Surendra Singh
- Bhabha Atomic Research Centre 3 Solid State Physics Division, , Mumbai 400 085, India
-
- S. Basu
- Bhabha Atomic Research Centre 3 Solid State Physics Division, , Mumbai 400 085, India
Description
<jats:p>Neutron supermirrors and supermirror polarizers are thin film multilayer based devices which are used for reflecting and polarizing neutrons in various neutron based experiments. In the present communication, the in-house development of a 9 m long in-line dc sputtering system has been described which is suitable for deposition of neutron supermirrors on large size (1500 mm × 150 mm) substrates and in large numbers. The optimisation process of deposition of Co and Ti thin film, Co/Ti periodic multilayers, and a-periodic supermirrors have also been described. The system has been used to deposit thin film multilayer supermirror polarizers which show high reflectivity up to a reasonably large critical wavevector transfer of ∼0.06 Å−1 (corresponding to m = 2.5, i.e., 2.5 times critical wavevector transfer of natural Ni). The computer code for designing these supermirrors has also been developed in-house.</jats:p>
Journal
-
- Review of Scientific Instruments
-
Review of Scientific Instruments 85 (12), 123103-, 2014-12-01
AIP Publishing
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1362825895326240128
-
- ISSN
- 10897623
- 00346748
-
- Data Source
-
- Crossref