Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors

A. Biswas, R. Sampathkumar, Ajaya Kumar, D. Bhattacharyya, N. K. Sahoo, K. D. Lagoo, R. D. Veerapur, M. Padmanabhan, R. K. Puri, Debarati Bhattacharya, Surendra Singh, S. Basu

doi:10.1063/1.4902184

Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors

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A. Biswas

Bhabha Atomic Research Centre 1 Atomic & Molecular Physics Division, , Mumbai 400 085, India
R. Sampathkumar

Bhabha Atomic Research Centre 1 Atomic & Molecular Physics Division, , Mumbai 400 085, India
Ajaya Kumar

Bhabha Atomic Research Centre 1 Atomic & Molecular Physics Division, , Mumbai 400 085, India
D. Bhattacharyya

Bhabha Atomic Research Centre 1 Atomic & Molecular Physics Division, , Mumbai 400 085, India
N. K. Sahoo

Bhabha Atomic Research Centre 1 Atomic & Molecular Physics Division, , Mumbai 400 085, India
K. D. Lagoo

Bhabha Atomic Research Centre 2 Division of Remote Handling & Robotics, , Mumbai 400 085, India
R. D. Veerapur

Bhabha Atomic Research Centre 2 Division of Remote Handling & Robotics, , Mumbai 400 085, India
M. Padmanabhan

Bhabha Atomic Research Centre 2 Division of Remote Handling & Robotics, , Mumbai 400 085, India
R. K. Puri

Bhabha Atomic Research Centre 2 Division of Remote Handling & Robotics, , Mumbai 400 085, India
Debarati Bhattacharya

Bhabha Atomic Research Centre 3 Solid State Physics Division, , Mumbai 400 085, India
Surendra Singh

Bhabha Atomic Research Centre 3 Solid State Physics Division, , Mumbai 400 085, India
S. Basu

Bhabha Atomic Research Centre 3 Solid State Physics Division, , Mumbai 400 085, India

説明

<jats:p>Neutron supermirrors and supermirror polarizers are thin film multilayer based devices which are used for reflecting and polarizing neutrons in various neutron based experiments. In the present communication, the in-house development of a 9 m long in-line dc sputtering system has been described which is suitable for deposition of neutron supermirrors on large size (1500 mm × 150 mm) substrates and in large numbers. The optimisation process of deposition of Co and Ti thin film, Co/Ti periodic multilayers, and a-periodic supermirrors have also been described. The system has been used to deposit thin film multilayer supermirror polarizers which show high reflectivity up to a reasonably large critical wavevector transfer of ∼0.06 Å−1 (corresponding to m = 2.5, i.e., 2.5 times critical wavevector transfer of natural Ni). The computer code for designing these supermirrors has also been developed in-house.</jats:p>