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A heteroepitaxial MIM-Ta/sub 2/O/sub 5/ capacitor with enhanced dielectric constant for DRAMs of G-bit generation and beyond
Journal
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- 2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.01 CH37184)
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2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.01 CH37184) 41-42,
Japan Soc. Appl. Phys
