Ferroelectric thin films for micro-sensors and actuators: a review

Details 詳細情報について

• CRID

  1363107368921052544

• NII Article ID

  30017862843

• DOI

  10.1088/0960-1317/10/2/307

• ISSN

  13616439

  09601317

  http://id.crossref.org/issn/09601317

• Data Source

  • Crossref
  • CiNii Articles