Towards artifact-free atomic-resolution elemental mapping with electron energy-loss spectroscopy

  • Y. Zhu
    Monash Centre for Electron Microscopy, Monash University 1 , Victoria 3800, Australia
  • A. Soukiassian
    Department of Materials Science and Engineering, Cornell University 3 , Ithaca, New York 14853, USA
  • D. G. Schlom
    Department of Materials Science and Engineering, Cornell University 3 , Ithaca, New York 14853, USA
  • D. A. Muller
    Kavli Institute at Cornell for Nanoscale Science 4 , Ithaca, New York 14853, USA
  • C. Dwyer
    Monash Centre for Electron Microscopy, Monash University 1 , Victoria 3800, Australia

書誌事項

公開日
2013-09-30
DOI
  • 10.1063/1.4823704
公開者
AIP Publishing

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説明

<jats:p>Atomic-resolution elemental maps of materials obtained using energy-loss spectroscopy in the scanning transmission electron microscope (STEM) can contain artifacts associated with strong elastic scattering of the STEM probe. We demonstrate how recent advances in instrumentation enable a simple and robust approach to reduce such artifacts and produce atomic-resolution elemental maps amenable to direct visual interpretation. The concept is demonstrated experimentally for a (BaTiO3)8/(SrTiO3)4 heterostructure, and simulations are used for quantitative analysis. We also demonstrate that the approach can be used to eliminate the atomic-resolution elastic contrast in maps obtained from lower-energy excitations, such as plasmon excitations.</jats:p>

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