Positioning of an X-Y Stage Using the Horizontal Acceleration Signal of the Base Plate

DOI Web Site 被引用文献3件

書誌事項

公開日
1993-08-20
DOI
  • 10.20965/jrm.1993.p0344
公開者
Fuji Technology Press Ltd.

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説明

<jats:p>In this paper, we formulate the effectiveness of the horizontal acceleration feedback for an X-Y stage installed in the reduction stepper by. using the 2-degree-of-freedom mechanical model and show that its feedback is equivalent to the zeroing of disturbance. Furthermore, we propose the disturbance observer instead of acceleration feedback, and its superior performance is illustrated by using the numerical simulation.</jats:p>

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