A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation
書誌事項
- 公開日
- 2011-04
- 権利情報
-
- https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html
- DOI
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- 10.1109/tase.2010.2077675
- 公開者
- Institute of Electrical and Electronics Engineers (IEEE)
この論文をさがす
収録刊行物
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- IEEE Transactions on Automation Science and Engineering
-
IEEE Transactions on Automation Science and Engineering 8 (2), 265-279, 2011-04
Institute of Electrical and Electronics Engineers (IEEE)
