Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS

DOI PDF 4 Citations

Journal

IEEE Journal of Selected Topics in Quantum Electronics

IEEE Journal of Selected Topics in Quantum Electronics 17 (3), 629-644, 2011-05

Institute of Electrical and Electronics Engineers (IEEE)

Citations (4)*help

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Details 詳細情報について

CRID

1363951794229476480
DOI

10.1109/jstqe.2010.2093570
ISSN

15584542

1077260X
Web Site

http://xplorestaging.ieee.org/ielx5/2944/5784182/05685656.pdf?arnumber=5685656
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