Thin Film Piezoelectrics for MEMS
Journal
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- Journal of Electroceramics
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Journal of Electroceramics 12 (1/2), 7-17, 2004-01
Springer Science and Business Media LLC
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Details 詳細情報について
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- CRID
- 1363951794973492224
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- ISSN
- 13853449
- http://id.crossref.org/issn/13853449
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- Data Source
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- Crossref