Temperature Dependence of Quality Factor in MEMS Resonators

DOI PDF 3 Citations

Journal

Journal of Microelectromechanical Systems

Journal of Microelectromechanical Systems 17 (3), 755-766, 2008-06

Institute of Electrical and Electronics Engineers (IEEE)

Citations (3)*help

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Details 詳細情報について

CRID

1364233270293941120
DOI

10.1109/jmems.2008.924253
ISSN

10577157
Web Site

http://xplorestaging.ieee.org/ielx5/84/4538081/04538082.pdf?arnumber=4538082
Data Source
- Crossref

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