X線光電子分光法による薄い金属表面酸化膜の膜厚測定(<特集>表面・界面・薄膜と分析化学)

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タイトル別名
  • Thickness determination of thin oxide layers on metal surfaces using X-ray photoelectron spectroscopy.
  • Ｘ線光電子分光法による薄い金属表面酸化膜の膜厚測定
  • Xセン コウデンシ ブンコウホウ ニ ヨル ウスイ キンゾク ヒョウメン サン

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Surface analysis of metals covered with thin oxide layers has been performed using X-ray photoelectron spectroscopy. Samples of Al2O3/Al, PbO/Pb, MgO/Mg and SiO2/Si were used. The spectra showing a double-peak structure due to metal and oxide components have been decomposed by a curve-fitting technique in order to obtain the intensities of each component. The thickness of the oxide layers obtained from these intensity ratios have been measured for various electron take-off angles. Two different X-rays of MgKα and AlKα were employed to observe the effect due to the different inelastic mean-free paths. The experimental results concerning the thickness obtained for these X-rays were in excellent agreement with each other. It was confirmed that for flat samples, such as SiO2/Si, a measurement using only one take-off angle is required to obtain an overlayer thickness. On the contrary, measurements should be carried out for various take-off angles so as to deduce reliable values for such samples as lead for which the surface roughness cannot be neglected. As for aluminium and silicon oxide layers formed by exposure to air for a sufficiently long time, thicknesses of about 33 Å and 11 Å were obtained, respectively.

収録刊行物

  • 分析化学

    分析化学 40 (11), 691-696, 1991

    公益社団法人 日本分析化学会

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