Monte-Carlo Simulation of Rarefied Vapor Flow of Aluminum in an Air-to-Air Metallizer.
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- ITO Yoshifumi
- Mitsubishi Heavy Industries, Hiroshima Works and Hiroshima R & D Center
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- SHIMAKAWA Tsukasa
- Mitsubishi Heavy Industries, Hiroshima Works and Hiroshima R & D Center
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- KUWADA Chiye
- 三菱重工業 (株) 広島研究所
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- HIRAI Etsuro
- 三菱重工業 (株) 広島研究所
Bibliographic Information
- Other Title
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- 連続式真空蒸着機におけるアルミニウム希薄蒸気流のモンテカルロシミュレーション
- レンゾクシキ シンクウ ジョウチャクキ ニ オケル アルミニウム キハク ジョ
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Abstract
The direct simulation Monte-Carlo method has been used to study the behavior of rarefied vapor flow of aluminum through deposition equipment, where the space between the crucible and the film is surrounded by hood-shaped channels. Aluminum other than that deposited on the film is mostly trapped on the channel walls and recycled.<BR>The utilization of aluminum calculated by the simulation is in good agreement with the experimental results.
Journal
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- Shinku
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Shinku 40 (5), 431-435, 1997
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001204063413888
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- NII Article ID
- 10001958941
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 4247798
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed