書誌事項
- タイトル別名
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- Influence of the Electrons and the Ions Generated Outside of the Gauge on the Total Pressure Measurement by the Axial-symmetric Transmission Gauge
- ジク タイショウ トウカガタ デンリ シンクウケイ ニ オケル ガイブ ニュウシャ デンシ イオン ニ ヨル エイキョウ ノ ジョキョ トクセイ
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The effect of disturbances induced by the injection of the electrons and ions from outside of the gauge on the axial-symmetric transmission gauge (AT gauge) was examined. There were less sign of disturbance in comparison to a BA gauge and an extractor gauge. The energy analyzer in the AT gauge works as a cut off filter for the charged particles and reduces the disturbances from the external source as well as the effects of the soft x-rays and ESD (electron stimulated desorption) ion generated in the ionizer.
収録刊行物
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- 真空
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真空 46 (8), 619-623, 2003
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390001204063882368
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- NII論文ID
- 10011611332
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 6671547
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
