書誌事項
- タイトル別名
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- Phase Control of Bi2Sr2Can-1CunOy Sputtered Films using He Gas.
- He ガス オ モチイタ Bi2Sr2Can 1CunOy スパッタ ハクマク ノ ソセイ セイギョ
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We prepared Bi2Sr2Can-1CunOy (BSCCO) thin films by RF magnetron sputtering using a mixture of He + O2 sputtering gas (He : O2= 4 : 1). As helium gas effectively generates active particles of O2+ and O+ by the Penning ionization effect, the crystallinity of the films is expected to improve.<BR>The crystallinity and the composition of films were dependent on the composition of targets. When we prepared the Bi -2212 films using the targets of Bi : Sr : Ca : Cu = 2 : 2 : 1 : Z (Z = 1.0-3.0), the best crystallinity of the film was obtained using the target of Z = 2.0. Furthermore, we prepared the Bi-2223 films with the composition of target, Bi : Sr : Ca : Cu = 2 : 2 : 2 : 3. The films with dominant Bi-2223 single phase were obtained only at Tsub = 630°C, but Bi-2223 and Bi-2212 mixed phases appeared at the other substrate temperatures.
収録刊行物
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- 真空
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真空 45 (3), 297-300, 2002
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390001204065332608
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- NII論文ID
- 10008203171
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 6144735
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可