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Vacuum Technology for a Better Global Environment. Efforts to Reduce Greenhouse Gas from Dry Etch Tools.
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- SHIMODA Takahiro
- Tokyo Electron Yamanashi Limited ES Development Engineering Dept.
Bibliographic Information
- Other Title
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- 真空技術と地球環境 ドライエッチング装置における地球温暖化ガス削減の取り組み
- カイセツ ドライ エッチング ソウチ ニ オケル チキュウ オンダンカ ガス サクゲン ノ トリクミ
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Journal
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- Shinku
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Shinku 42 (11), 964-967, 1999
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001204065342592
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- NII Article ID
- 10004568625
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 4921567
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL Search
- Crossref
- CiNii Articles