書誌事項
- タイトル別名
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- Finite-element Analysis of the Characteristics in Super High Pressure Mercury Vapor Lamp Bulbs under Internal Pressure
- ユウゲン ヨウソホウ ニ ヨル チョウコウアツ スイギン ホウデントウ バルブ ノ タイナイアツ トクセイ カイセキ
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Super high pressure mercury discharge short arc lamps have been used as light sources for photolithography, such as patterning LCDs, PCBs and semiconductors. Normally, their bulbs are made of silica glass. This study evaluates optimal shapes for various lamp bulbs under internal pressure using the Finite Element Method (FEM). We obtained an optimal shape and the relationship between the fracture stress and the bulb thicknes. The optimal shape was obtained at 0.7≤D/L≤0.9, where L is the total length of the bulb and D is the diameter. To verify our computed results, we conducted static water pressure tests. We found simularities between the numerical results and experiments.
収録刊行物
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- 照明学会誌
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照明学会誌 87 (8), 576-583, 2003
一般社団法人 照明学会
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詳細情報 詳細情報について
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- CRID
- 1390001204087820672
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- NII論文ID
- 130006767554
- 110001143304
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- NII書誌ID
- AN00268860
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- ISSN
- 1349838X
- 21851506
- 00192341
- http://id.crossref.org/issn/00192341
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- NDL書誌ID
- 6658305
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可