Application of Gases to Surface Finishing Technologies. Gas Usage for CVD Technology.
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- USHIKAWA Harunori
- Tokyo Electron Limited
Bibliographic Information
- Other Title
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- ガスと表面処理 ＣＶＤとガス
- CVD ト ガス
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Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 49 (6), 547-551, 1998
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390001204113640192
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- NII Article ID
- 10002109392
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- NII Book ID
- AN1005202X
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- ISSN
- 18843409
- 09151869
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- NDL BIB ID
- 4502317
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
